JPH0547160B2 - - Google Patents

Info

Publication number
JPH0547160B2
JPH0547160B2 JP62070242A JP7024287A JPH0547160B2 JP H0547160 B2 JPH0547160 B2 JP H0547160B2 JP 62070242 A JP62070242 A JP 62070242A JP 7024287 A JP7024287 A JP 7024287A JP H0547160 B2 JPH0547160 B2 JP H0547160B2
Authority
JP
Japan
Prior art keywords
electrode
film
ultrasonic transducer
ultrasonic
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62070242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63237699A (ja
Inventor
Kenichiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7024287A priority Critical patent/JPS63237699A/ja
Publication of JPS63237699A publication Critical patent/JPS63237699A/ja
Publication of JPH0547160B2 publication Critical patent/JPH0547160B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
JP7024287A 1987-03-26 1987-03-26 超音波トランスジユ−サ Granted JPS63237699A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7024287A JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7024287A JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Publications (2)

Publication Number Publication Date
JPS63237699A JPS63237699A (ja) 1988-10-04
JPH0547160B2 true JPH0547160B2 (en]) 1993-07-15

Family

ID=13425902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7024287A Granted JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Country Status (1)

Country Link
JP (1) JPS63237699A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6395390B2 (ja) * 2014-02-07 2018-09-26 キヤノン株式会社 静電容量型トランスデューサおよびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (ja) * 1985-03-26 1986-09-30 Nec Corp 超音波センサ

Also Published As

Publication number Publication date
JPS63237699A (ja) 1988-10-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term